
[067] Industry briefing - EUV The Focal Point
This post was created using AI. Please check the information if you want to use it as a basis for decision-making. New TSMC and Samsung figures reinforce the scale of semiconductor demand, while GlobalFoundries adds a dated interposer-supply plan for TSMC. The focus examines the Hyper-NA study's principal unresolved constraint: a smaller focus budget and the need for thinner resists. Architectural reuse could limit transition spending, but the proposed optics are not a commercial production commitment. Key takeaways - TSMC reported September revenue of NT$511.86 billion, up 54.6% year on year and down 0.6% month on month; January–September revenue grew 41.1%. - Samsung's preliminary Q3 guidance projects KRW195 trillion in consolidated sales and KRW107.4 trillion in operating profit, versus KRW12.17 trillion profit a year earlier; these are estimates, not final or foundry-specific results. - SIA reported sales exceeding US$1 trillion through August; its August figure of US$159.7 billion, up 8% sequentially, uses a WSTS three-month moving average. - Reuters reported AMD's plan for a substantial 2027 supply increase and need for more advanced wafer capacity; no wafer-volume, node-allocation or new-fab commitment was disclosed in those comments. - GlobalFoundries announced a US$2 billion agreement with TSMC for CoWoS silicon interposers, an initial five-year term and an expected Malta, New York volume ramp in H1 2028; this is packaging-component capacity. - The October 1 Hyper-NA paper proposes at least 0.75 numerical aperture at 13.5 nm and approximately 5 nm optical half-pitch; its roughly ten-year development estimate is not a committed delivery date. - The study identifies an approximately halved idealized depth of focus versus 0.55 NA, motivating better focus control and thinner resists; actual process windows remain pattern-dependent. - Source reuse leaves future power needs open; polarization can improve contrast but introduces a photon penalty, and a proposed 0.75-NA micro-exposure tool could support resist development. - ASML and TSMC have Q3 results scheduled for October 14 and 15 respectively; watch output guidance, advanced-node capacity and packaging execution, alongside measured Hyper-NA resist/focus results. Glossary EUV — Extreme ultraviolet lithography; the proposal retains the 13.5 nm wavelength. High-NA — High numerical aperture EUV; the 0.55-NA platform used as the study's comparison. Hyper-NA — Proposed EUV architecture with numerical aperture of at least 0.75. Half-pitch — Half the repeat distance of a periodic pattern; distinct from a commercial node name. Depth of focus — Axial imaging tolerance; an idealized optical value is not a complete manufacturing process window. Resist — Photosensitive patterning film; thinning it changes photon absorption and pattern-transfer requirements. Edge-placement error — Difference between an intended pattern edge and its realized position. Micro-exposure tool — Small-field research exposure system for developing materials under future optical conditions. CoWoS — Chip on Wafer on Substrate, TSMC's advanced packaging platform.



